LINEAR MOTOR
Linear Motor Stage (리니어 모터 & DD 모터 스테이지)
Stacked System for Multi-axis (다축 모션 스테이지 & 시스템)
Air-bearing Stage (에어베어링 스테이지)
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision X Stage
Precision XY Stage
Precision XY Stage
Precision XY Stage
Precision Z Stage
Precision Z Stage
Precision R Stage
Precision R Stage
Precision R Stage
Air Bearing
Air Bearing
ZR Stage
ZR Stage
Precision XYR Stage
XZR Stage
Z/TipTilt Stage
Z/TipTilt Stage
XYZR Stage
XYZ/TipTilt/R Stage
UHV Stage
Customized Solutions
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 50 ~ 400 mm
Speed : 2 m/s
Repeatability : ± 400 nm
Load Capacity : 40 kg, 450 N
Width 115 mm (S115-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 400 nm
Load Capacity : 50 kg, 450 N
Width 165 mm (S165-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 80 kg, 800 N
Width 190 mm (S190-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 120 kg, 1200 N
Width 225 mm (S225-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 50 ~ 400 mm
Speed : 2 m/s
Repeatability : ± 400 nm
Load Capacity : 45 kg, 450 N
Width 115 mm (G115-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 400 nm
Load Capacity : 45 kg, 450 N
Width 165 mm (G165-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 80 kg, 800 N
Width 190 mm (G190-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 120 kg, 1200 N
Width 225 mm (G225-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 185 kg, 1850 N
Width 280 mm (G280-IL)_Ironless
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 80 kg, 650 N
Width 190 mm (G190-IC)_Iron Core
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 120 kg, 1200 N
Width 225 mm (G225-IC)_Iron Core
리니어 모터 스테이지
Direct Driven Linear Stage
Travel Range : 100 ~ 1200 mm
Speed : 2 m/s
Repeatability : ± 300 nm
Load Capacity : 185 kg, 1850 N
Width 280 mm (G280-IC)_Iron Core
리니어 모터 XY 스테이지
Direct Driven XY Stage
Travel Range : 100 ~ 1200 mm
High Resolution Absolute Encoder
Load Capacity : 40kg, 400 N
Speed : 2 m/s
Side Cover Protect Against Particles
리니어 모터 XY 스테이지
Direct Driven XY Stage
Travel Range : 230 x 230 mm
Repeatability : ±30 nm
Accuracy : ±120 nm
Load Capacity : 20 kg
Max. Velocity : 400 mm/s
리니어 모터 로테이션 스테이지
Direct Driven Rotation Stage
Repeatability : ±1.5 arcsec
Accuracy : ±2.5 arcsec
Axial & Radial Runout : ±0.5 µm
Rated Speed : 3600 RPM
Load Capacity : 52 kg
리니어 모터 로테이션 스테이지
Direct Driven Rotation Stage
Repeatability : ±1.5 arcsec
Accuracy : ±2.5 arcsec
Axial & Radial Runout : ±0.5 µm
Rated Speed : 3600 RPM
Load Capacity : 52 kg
리니어 모터 로테이션 스테이지
Direct Driven Rotation Stage
Repeatability : ±1.5 arcsec
Accuracy : ±2.5 arcsec
Axial & Radial Runout : ±0.5 µm
Rated Speed : 3600 RPM
Load Capacity : 52 kg
리니어 모터 XYR 스테이지
Direct Driven XYR Stage
Travel Range : 100 ~ 1200 mm
High Resolution Absolute Encoder
Load Capacity : 400 N
Speed : 2 m/s
Side Cover Protect Against Particles
커스텀 : 다축 모션 & 진동제어
Custom : Multi-Axis & AVIS
Turnkey Concepts
High Precision Measurement Technology
Electrostatic & Vacuum Chuck
Dust-free Cable System
Active Vibration Isolation System (Piezo)