MINIATURE SYSTEMS

Ultrasonic Piezomotor Stage (초음파 피에조 모터 스테이지)
Walking Piezomotor Stage (스텝 피에조 모터 스테이지)
Stick-slip Piezomotor Stage (스틱-슬립 피에조 모터 스테이지)

Ultrasonic Motors

Ultrasonic X Actuators

Ultrasonic X Stages

Ultrasonic Z Stages

Ultrasonic XY Stage

Ultrasonic Controllers

Actuator & Mirror Mounts

Walking X Stages

Walking X Stage

Walking Z Stage

Walking TipTilt Stage

Walking XYR Stage

Walking HexStages

Walking Piezo Controller

Customized Solutions

초음파 피에조 모터
Ultrasonic Piezo Motor

Min. Step Size : 50 ~ 100 μm (Pulsed Operation)
Smooth Power Delivery : 1N, 3N, 5N or 10N
Max. Speed : 1000 mm/s
Ultra Durable : Lifetime > 1000 km
Integrated Controller

Data Sheet

Manual

Video

3D Drawing

초소형 리니어 액추에이터
Miniature Linear Actuator

Travel Range : 5 mm ~ 300 mm
Resolution : 50 µm ~ 78 nm
Velocity : Up to 1000 mm/s
Drive Force : Up to 10 N
Ultra Durable & Power-Off Locking

Data Sheet

Manual

Video

3D Drawing

초소형 리니어 스테이지
Miniature Linear Stage

Travel Range : 10 ~ 110 mm
Min. Incremental Motion : 25 nm
Repeatability : ± 50 nm
Drive Force : Up to 5 N
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

3D Drawing

초소형 로테이션 스테이지
Miniature Rotation Stage

Size : From 40 x 31 x 15 mm
Load Capacity : Up to 2.5 kg
Axial Error Motion : < 0.5 µm
Radial Error Motion : < 1 µm
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

3D Drawing

초음파 피에조모터 Z스테이지
Ultrasonic Piezo Z Stage

Travel Range : 10 mm
Resolution : Down to 1 nm
Load Capacity : 2.5 kg
Drive Force : 15 N
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

3D Drawing

초음파 피에조모터 XY스테이지
Ultrasonic Piezo XY Stage

Travel Range : 100 x 100 mm
Min. Incremental Motion : 50 nm
Repeatability : ± 100 nm
Load Capacity : 3 kg
Slow & Constant Speeds for Microscopy

Data Sheet

Manual

Video

3D Drawing

초음파 피에조모터 컨트롤러
Ultrasonic Piezo Controller

Various Communication Protocol
Libraries for LabVIEW, Matlab, C++...
Digital & Analog IOs
Drive signal: 45 V (0 ~ 200 kHz)
Operating temperature: 0 to 40 °C

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 리니어 액추에이터
Walking Piezo Linear Actuator

Travel Range : 9 mm (13 °)
Resolution : 2 nm (0.05 µrad)
Repeatability : ± 200 nm (± 0.05 µrad)
Drive Force : 10 N
HV (10⁻⁶ mbar) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 리니어 스테이지
Walking Piezo Linear Stage

Travel Range : 20 / 35 / 50 mm
Min. Incremental Motion : 2 nm
Repeatability : ± 100 nm
Drive Force : Up to 10 N
HV (10⁻⁶ mbar) Option

스텝 피에조 리니어 스테이지
Walking Piezo Linear Stage

Travel Range : 90 mm
Min. Incremental Motion : 2 nm
Repeatability : ± 200 nm
Drive Force : Up to 10 N
HV (10⁻⁶ mbar) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 Z 스테이지
Walking Piezo Z Stage

Travel Range : 10 mm
Min. Incremental Motion : 2 nm
Repeatability : ± 100 nm
Drive Force : Up to 10 N
HV (10⁻⁶ mbar) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 TipTilt 스테이지
Walking Piezo TipTilt Stage

Travel Range in Z :
Travel Range in Θ(XY) : ±3 °
Min. Incremental Motion : 2 nm
Load Capacity : 10 N
HV (10⁻⁶ mbar) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 XYR 스테이지
Walking Piezo XYR Stage

Travel Range in XY :
Travel Range in Θ(R) : ±10 °
Min. Incremental Motion : 2 nm
Load Capacity : 10 N
HV (10⁻⁶ mbar) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 6축 스테이지
Walking Piezo HexStage

Travel Range in XYZ : ±5 mm
Travel Range in Θ(XYZ) : ±10 °
Min. Incremental Motion : 2 nm
Load Capacity : 10 N
HV (10⁻⁶ mbar) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 컨트롤러
Walking Piezo Controller

3 Axes (6 with Two Daisy-Chained)
USB C & RS485 Communication Interfaces
Libraries for LabVIEW, C++
Digital IO For Trigger Function
Operating Temperature: 0 ~ 50 °C

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 OEM 컨트롤러
W Piezo OEM Controller

Up to 4 Axes (Stacked Design)
USB C & RS485 Communication Interfaces
Libraries for LabVIEW, C++
39 x 59 x 10 mm Size (Only 1 Board)
Operating Temperature: 0 ~ 50 °C

Data Sheet

Manual

Video

3D Drawing

커스텀 : 카운터 밸런스
Custom : Mass Compensation

Custom Motion System Designs
Special Environment (UHV)
Applying Mass Compensation
Support All Common Communication Protocols
Integrated Controllers Possible

Data Sheet

Manual

Video

3D Drawing

커스텀 : 비자성
Custom : Non Magnetic

Custom Motion System Designs
Special Environment (Non Magnetic)
Applying Mass Compensation
Support All Common Communications
Integrated Controllers Possible

Data Sheet

Manual

Video

3D Drawing