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PIEZO SYSTEMS

 Piezo Actuator (피에조 액추에이터)
 Piezo Stage (피에조 스테이지)
 Piezo Objective Stage (피에조 대물렌즈 스테이지)

Piezo Stacks
Preloaded Actuators
Preloaded Actuators
Parallel Lever Actuators
Double Lever Actuators
X Axis Stages (SGS)
X Axis Stages (CAP)
X Axis Stages (SGS/CAP)
XY Axis Stages (SGS/CAP)
XY Axis Stages (SGS/CAP)
Z Axis Stages (SGS)
Z Axis Stages (SGS)
Z Axis Stages (CAP)
Z Axis Stages (SGS)
XYZ Axis Stages (SGS)
XYZ Axis Stage (SGS/CAP)
XYR Axis Stages (CAP)
Objective Stages (SGS)
Objective Stages (SGS)
Objective Stages (SGS)
Objective Stages (SGS)
Objectives (SGS/CAP)
Beam Steering (SGS)
OEM Piezo Controller
Digital Piezo Controller
Digital Piezo Controller
High-end Piezo Controller
Customized Solutions
피에조 스택 액추에이터
Piezo Stack Actuator

Travel Range : 15 ~ 90 µm 
Push/Pull Force : 1,500 / 50 N
Blocking Force : 1,125 N 
Resonance, Unloaded : 105 ~ 24 kHz 
Spherical End Pieces Option

Data Sheet
Manual
Video
3D Drawing
피에조 액추에이터
Piezo Preloaded Actuator

Travel Range : 15 ~ 216 µm 
Min. Incremental Motion : 0.1 ~ 1 nm
Pull/Push Force : 1,400 / 100 N
Resonance, Unloaded : 20 ~ 6 kHz 
Spherical End Pieces Option

Data Sheet
Manual
Video
3D Drawing
피에조 액추에이터
Piezo Preloaded Actuator

Travel Range : 50 ~ 150 µm 
Min. Incremental Motion : 0.5 ~ 1.5 nm (SGS)
Pull/Push Force : 1,400 / 100 N
Resonance, Unloaded : 12 ~ 6 kHz 
Spherical End Pieces Option

Data Sheet
Manual
Video
3D Drawing
피에조 레버 액추에이터
Piezo Lever Actuator

Travel Range : 100 ~ 1,000 µm 
Min. Incremental Motion : 2 ~ 25 nm (SGS Sensor)
Repeatability : 7 ~ 60 nm 
Pull/Push Force : 50 ~ 30 / 15 ~ 20 N 
HV / UHV Options

Data Sheet
Manual
Video
3D Drawing
피에조 레버 액추에이터
Piezo Lever Actuator

Travel Range : 100 ~ 1,600 µm 
Min. Incremental Motion : 2 ~ 25 nm (SGS Sensor)
Repeatability : 7 ~ 60 nm 
Pull/Push Force : 200 ~ 30 / 100 ~ 10 N 
HV / UHV Options

Data Sheet
Manual
Video
3D Drawing
리니어 피에조 스테이지
Linear Piezo Stage

Travel Range : 100 ~ 600 µm 
Min. Incremental Motion : 1 ~ 6 nm (SGS Sensor)
Repeatability : 10 ~ 50 nm 
Load Capacity : 500 ~ 200 g 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
리니어 피에조 스테이지
Linear Piezo Stage

Travel Range : 45 ~ 90 µm 
Min. Incremental Motion : 0.3 ~ 0.5 nm (CAP)
Repeatability : 4 ~ 8 nm 
Pull/Push Force : 200 / 25 N ~ 100 / 10 N 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
리니어 피에조 스테이지
Linear Piezo Stage

Travel Range : 100 ~ 1,000 µm 
Min. Incremental Motion : 0.5 ~ 15 nm (SGS/CAP)
Repeatability : 5 ~100 nm 
Pull/Push Force : 30 ~ 50 / 10~20 N 
HV / UHV Options

Data Sheet
Manual
Video
3D Drawing
XY축 피에조 스테이지
XY Axis Piezo Stage

Travel Range : 100 ~ 600 µm 
Min. Incremental Motion : 1 ~ 6 nm (SGS/CAP)
Repeatability : 10 ~ 50 nm 
Load Capacity : 500 ~ 200 g 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
XY축 피에조 스테이지
XY Axis Piezo Stage

Travel Range : 100 ~ 600 µm 
Min. Incremental Motion : 0.5 ~ 3 nm (SGS/CAP)
Repeatability : 5 ~ 30 nm
Linearity : 0.02 % 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
Z축 피에조 스테이지
Z Aixs Piezo Stage

Travel Range : 100 ~ 500 µm 
Min. Incremental Motion : 1 ~ 5 nm (SGS Sensor)
Repeatability : 10 ~ 50 nm
Pull/Push Force : 15 ~ 40 / 10 ~ 20 N 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
Z축 피에조 스테이지
Z Aixs Piezo Stage

Travel Range : 120 ~ 650 µm 
Min. Incremental Motion : 1 ~ 4 nm (SGS Sensor)
Repeatability : 10 ~ 30 nm
Pull/Push Force : 50 / 20 N ~ 40 / 15 N 
HV / UHV Options

Data Sheet
Manual
Video
3D Drawing
Z축 피에조 스테이지
Z Aixs Piezo Stage

Travel Range : 100 µm 
Min. Incremental Motion : 0.8 nm (CAP Sensor)
Repeatability : 5 nm 
Load Capacity : 5 kg 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
Z축 피에조 스테이지
Z Aixs Piezo Stage

Travel Range : 300 µm 
Min. Incremental Motion : 3 nm (SGS Sensor)
Repeatability : 30 nm 
Load Capacity : 5 kg 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
XYZ축 피에조 스테이지
XYZ Axis Piezo Stage

Travel Range : 100 ~ 600 µm (500µm in Z)
Min. Incremental Motion : 1 ~ 6 nm (SGS Sensor)
Repeatability : 10 ~ 50 nm
Load Capacity : 500 ~ 200 g 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
XYZ축 피에조 스테이지
XYZ Axis Piezo Stage

Travel Range : 100 ~ 600 µm 
Min. Incremental Motion : 0.5 ~ 3 nm (SGS/CAP)
Repeatability : 5 ~ 30 nm
Linearity : 0.02 % 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
XYR축 피에조 스테이지
XYR Axis Piezo Stage

Travel Range : 100 ~ 600 µm 
Min. Incremental Motion : 0.5 ~ 3 nm (CAP Sensor)
Repeatability : 5 ~ 30 nm
Linearity : 0.02 % 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
대물렌즈 피에조 스테이지
Objective Piezo Stage

Travel Range : 100 µm 
Min. Incremental Motion : 1 nm (SGS Sensor)
Repeatability : 10 nm
Pull/Push Force : 80 / 30 N 
Resonance, with 200g : 1,100 Hz

Data Sheet
Manual
Video
3D Drawing
대물렌즈 피에조 스테이지
Objective Piezo Stage

Travel Range : 150 µm 
Min. Incremental Motion : 2 nm (SGS Sensor)
Repeatability : 15 nm
Pull/Push Force : 10 / 20 N 
HV / UHV Options

Data Sheet
Manual
Video
3D Drawing
대물렌즈 피에조 스테이지
Objective Piezo Stage

Travel Range : 200 µm 
Min. Incremental Motion : 2 nm (SGS Sensor)
Repeatability : 20 nm
Pull/Push Force : 10 / 5 N 
HV / UHV Options

Data Sheet
Manual
Video
3D Drawing
대물렌즈 피에조 스테이지
Objective Piezo Stage

Travel Range : 100 ~ 600 µm 
Min. Incremental Motion : 1 ~ 6 nm (SGS)
Repeatability : 10 ~ 50 nm
Pull/Push Force : 10 ~15 / 20 N 
HV / UHV Options

Data Sheet
Manual
Video
3D Drawing
대물렌즈 피에조 스테이지
Objective Piezo Stage

Travel Range : 100 ~ 800 µm 
Min. Incremental Motion : 1.5 ~ 12 nm (SGS/CAP)
Repeatability : 10 ~ 80 nm
Pull/Push Force : 10 ~15 / 20 N 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
빔 얼라인 피에조 스테이지
Beem Steering Piezo Stage

Travel Range : 6 / 12 µrad 
Min. Incremental Motion : 50 nrad (SGS Sensor)
Repeatability : 250 nrad
Resonance, ø25 Mirror : 1.5 kHz 
HV / UHV / Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
디지털 피에조 컨트롤러
EOD-060310 Digital Controller

Single Axis, OEM Version
Strain Gauge Sensor (SGS)
DAC Resolution : 18 Bit
Current : 150 mA (Peak) & 60 mA (Average)
Interface : USB & Ethernet

Data Sheet
Manual
Video
3D Drawing
디지털 피에조 컨트롤러
EBD-060310 Digital Controller

Single Axis, Bench-top Version
Strain Gauge Sensor (SGS)
DAC Resolution : 18 Bit
Current : 150 mA (Peak) & 60 mA (Average)
Interface : USB & Ethernet

Data Sheet
Manual
Video
3D Drawing
디지털 피에조 컨트롤러
EBD-0603n0 Digital Controller

Multi Axis, Bench-top Version
Strain Gauge Sensor (SGS)
DAC Resolution : 18 Bit
Current : 150 mA (Peak) & 60 mA (Average)
Interface : USB & Ethernet

Data Sheet
Manual
Video
3D Drawing
디지털 피에조 컨트롤러
EBx-1203n0 Digital Controller

Multi Axis, Bench-top Version
SGS & Capacitive Sensor
DAC Resolution : 20 Bit
Current : 300 mA (Peak) & 120 mA (Average)
Interface : RS232, USB, Ethernet, SPI, Parallel

Data Sheet
Manual
Video
3D Drawing
커스텀 : 비자성 & 고진공
Custom : Non Magnetic & UHV

Position Sensor : SGS & Capacitive
Travel Range : µm ~ mm 
Flexible Up To 6 Degrees Of Freedom
Special Options : UHV & Non Magnetic
Special Designed Piezo Drivers

Data Sheet
Manual
Video
3D Drawing
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