Travel Range : 50 ~ 200 mm
Resolution : 5 µm (0.02 µm 256 x)
Load Capacity : 50 kg
Maximum Speed : 15 mm/s
Directly Stackable For XYZ Orientations

Travel Range : 50 ~ 70 mm
Mechanical Resolution : 1 µm
Load Capacity : 30 kg
Maximum Speed : 5 mm/s 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.1 °
Load Capacity : 100 kg
Maximum Speed : Up to 100 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.005 °
Load Capacity : 250 kg
Maximum Speed : 5 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Travel Range : ±180 °
Mechanical Resolution : 0.005 °
Load Capacity : 20 kg
Maximum Speed : 4 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Reduction Ratio : 4 ~100 : 1
Nominal Output Torque : 0.35 ~ 22.5 Nm
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar 
For D35.1 / D42 / D57 UHV Motor

Single-Channel UHV Stepper Motor Driver
USB, Ethernet and RS485 Interfaces
Up to 256x Micro-Step Resolution
2 x Limit Inputs With Homing Functionality
Operating Temperature: 10 ~ 60 °C

18-Way Feedthrough on DN40 CF
Male to Male Connection
1.5 mm Gold Plated Pins
Bakeable to 250 °C
Suitable For Use To 1 x 10⁻⁹ mBar

Vacuum-Suitable Manufacturing Processes
Careful Selection of Materials
Consideration Of Outgassing Behavior
Load Capacity Up To Several 100 kg
Encoder Options : Absolute & Incremental

Travel Range : 360 ° (Sensor Range 320 °)
Fine Tune Resolution @ 2 K : Down to 3 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 2.5 Ncm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Travel Range : Up to 100 μm in XYZ
Resolution : Down to 0.5 nm
Max. Load : Up to 0.5 kg
Repeatability : < 10 nm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Travel Range : 360 ° (Theta & Phi)
Basic Module : Rotator16 & Rotator25
Pure Ti or BeCu (Option)
Compatible Cryostats : 49mm Bore Size 
1.6 K, 1e-7 mbar, 35 Tesla (10 mK & UHV)

Adapter Plates
Flexible Thermal Connection Set
Tool Box
- BeCu Screws for 30 mK & 18 Tesla
- Connectors for 30 mK & 18 Tesla

Travel Range : 10 mm 
Min. Incremental Motion : 20 nm
Drive Force : 20 N 
Holding Force : 100 N 
UHV (10⁻¹¹ mbar) & Non Magnetic Options