UHV & CRYO
UHV Linear & Rotation Stages (고진공 모터 스테이지)
UHV Connectors & Feedthroughs (고진공 커넥터 & 피드쓰루)
Cryo Positioning Stage (극저온 스테이지)
UHV X Actuator
UHV X Stage
UHV X Stage
UHV X Stage
UHV R Stage
UHV Filter Wheel
UHV 6-Axis Stage
UHV Limit Switch
Multi-Axis Solutions
Customized Solutions
Cryo Linear Stage
Cryo Rotary Stage
Cryo Gonio Stage
Cryo Scanner Stage
Cryo Long Travel Stage
Cryo 3D Rotary Stage
Cryo Motion Controller
Cryo Accessories
Ultra Compact Stage
Piezo Linear Actuator
진공 리니어 액츄에이터
Vacuum Linear Actuator
Travel Range : 13, 26, 52 mm
Min. Step Size : 0.1 µm
Repeatability : ±1 µm
Force Capacity : 30 N
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo
진공 소형 리니어 스테이지
Vacuum Linear Stage
Travel Range : 13, 26, 52, 104 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 30 N
Suitable For Use To 1 x 10⁻⁹ mbar
진공 리니어 스테이지
Vacuum Linear Stage
Travel Range : 15 ~ 450 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 200 N
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo
진공 리니어 스테이지
Vacuum Linear Stage
Travel Range : 15 ~ 450 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 5 N / Carrier
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo
진공 로테이션 스테이지
Vacuum Rotation Stage
Travel Range : 360 °
Min. Step Size : 0.0001 °
Repeatability : ±0.0001 °
Load Capacity : 150 N
Suitable For Use To 1 x 10⁻⁹ mbar
진공 필터 휠
Vacuum Filter Wheel
Travel Range : 360 °
Min. Step Size : 0.001 °
Repeatability : <0.01 °
Load Capacity : 50 N
Suitable For Use To 1 x 10⁻⁹ mbar
진공 6축 모션 스테이지
Vacuum 6-Axis Motion Stage
Linear Travel Range : 16 / 50 / 18 mm in XYZ
Angular Travel Range : 30 / 15 / 10 ° in RxRyRz
Min. Step Size : 0.1 μm
Load Capacity : 35 N
Suitable For Use To 1 x 10⁻⁹ mbar
진공 리미트스위치
Vacuum Compatible Limit Switch
Overtravel : 2 mm
Repeatability : <0.5 µm
Normally-Closed (NC)
Bakeable to 200 °C
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo
커스텀 : 다축 모션 시스템
Custom : Multi-Axis
Vacuum-Suitable Manufacturing Processes
Careful Selection of Materials
Consideration Of Outgassing Behavior
Load Capacity Up To Several 10 kg
Encoder Options : Absolute & Increment
커스텀 : 짐벌 스테이지
Custom : Gimbal Stage
Travel Range : 13 mm & ±5 °
Min. Step Size : 50 nm & 0.0001 °
Repeatability : ±50 nm & ±0.0001 °
For 25mm or 1" Mirror
Suitable For Use To 1 x 10⁻⁹ mbar